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X-ray Lithography System - Indus-100D

Overview | Features | Design | Control system | Scanning stage | Photos


X-ray scanner handover

Handover of the X-ray scanner installed on BL-7 of the Indus-2 Synchrotron

The X-ray Scanner system for X-ray Lithography using synchrotron radiation was designed for beamline 7 on the Indus-2 Synchrotron. This X-ray scanner can create complex 3D high aspect ratio microstructures, with inclined and conical sidewalls, using the tilt and rotation of the mask and substrate relative to the X-ray beam from the synchrotron source.

Main components

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